Fabrication of planarised conductively patterned diamond for bio-applications

W Tong; K Fox; K Ganesan; AM Turnley; O Shimoni; PA Tran; A Lohrmann; T McFarlane; A Ahnood; DJ Garrett; H Meffin; NM O'Brien-Simpson; EC Reynolds; S Prawer

Journal article

Fabrication of planarised conductively patterned diamond for bio-applications

W Tong, K Fox, K Ganesan, AM Turnley, O Shimoni, PA Tran, A Lohrmann, T McFarlane, A Ahnood, DJ Garrett, H Meffin, NM O'Brien-Simpson, EC Reynolds, S Prawer

Materials Science and Engineering C | ELSEVIER SCIENCE BV | Published : 2014

DOI: 10.1016/j.msec.2014.07.016

Abstract

The development of smooth, featureless surfaces for biomedical microelectronics is a challenging feat. Other than the traditional electronic materials like silicon, few microelectronic circuits can be produced with conductive features without compromising the surface topography and/or biocompatibility. Diamond is fast becoming a highly sought after biomaterial for electrical stimulation, however, its inherent surface roughness introduced by the growth process limits its applications in electronic circuitry. In this study, we introduce a fabrication method for developing conductive features in an insulating diamond substrate whilst maintaining a planar topography. Using a combination of micro..

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University of Melbourne Researchers

Kumaravelu Ganesan Author

Hamish Meffin Author

Neil O'Brien-Simpson Author

Eric Reynolds Author

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Grants

Funding Acknowledgements

The authors wish to acknowledge the contribution of Dr. Marta Redrado Notivoli, Chemistry and Chemical Engineering Department, University of Melbourne for collecting AFM data and Ms Rosemary Cicione for her help in proofreading the final manuscript. The authors wish to acknowledge the Electron Microscopy unit of Bio21 Institute, The University of Melbourne for assistance with electron microscopy. Melbourne Centre for Nanofabrication is also acknowledged for the use of Oxford PlasmaLab 100 ICP-RIE General system. NICTA is funded by the Australian Government as represented by the Department of Broadband, Communications and the Digital Economy and the Australian Research Council through the ICT Centre of Excellence Program. This research was supported by the Australian Research Council (ARC) through its Special Research Initiative (SRI) in Bionic Vision Science and Technology grant to Bionic Vision Australia (BVA). The research was also supported by an interdisciplinary seed grant from the Melbourne Materials Institute.